|
|||
| SCANcube III 10 | |||
| Aperture | 10 mm | ||
|
Angle Transmitter of Galvanometer Scanners |
analog position detector | ||
| Optical Configuration | |||
|
Wavelength range (standard) |
Standard coatings for all common laser systems: YAG- & fiber lasers, Green lasers, UV lasers, CO2 lasers In addition, our portfolio includes numerous multiple wavelength and broadband coatings |
||
|
Max. laser power (standard systems, 100% duty cycle) |
200 W @ 1064 nm | ||
| Typical scan angle | ±0.35 rad (opt.) | ||
|
Image field size (1064 nm, f = 160 mm) |
110 mm x 110 mm | ||
| Fiber adapter | no | ||
| Gain error | < 5 mrad | ||
| Zero offset deviation | < 5 mrad | ||
| Dynamic | |||
| Number of installed tunings | 1 | ||
| Typical tuning | fast vector tuning | ||
| Tracking error | 0.12 ms | ||
|
Marking speed (f = 160 mm) |
3.0 m/s | ||
|
Positioning speed (f = 160 mm) |
16.0 m/s | ||
|
Writing speed (with F-Theta objective, f = 160 mm) |
|||
| High writing quality | 700 cps | ||
| Good writing quality | 925 cps | ||
|
Step response (settling to 1/1000 of full scale) |
|||
| 1% of full scale | 0.30 ms | ||
| 10% of full scale | 0.80 ms | ||
| Precision | |||
|
Repeatability (RMS) |
< 2 µrad | ||
|
Positioning resolution (max.)* |
16 bit * | ||
| Nonlinearity | < 0.9 mrad / 44° | ||
| Temperature drift | |||
| Offset | < 25 µrad/K | ||
| Gain | < 25 ppm/K | ||
|
8 hour drift (after 30 min warm-up) |
|||
| Offset | < 100 µrad | ||
| Gain | < 100 ppm | ||
|
24 hour drift (after 3 h warm-up) |
|||
| Offset | |||
| Gain | |||
|
* 16 bit: based on the full angle range (e.g. positioning resolution 11 µrad for angle range ±0.36 rad)
|
|||
| Electrics / Control | |||
| Servo control galvanometer scanner | analog servo control board | ||
|
Control interface (alternatives) |
digital SL2-100, digital XY2-100 standard, analog ±4.8 V |
||
| Advanced diagnosis options | no | ||
| Power requirements | ±15 V DC, max. 2 A each | ||
| Mechanics | |||
| Scan axes | 2-axis system | ||
| Housing variants | standard: scan head | ||
| Connector positions | beam entrance side | ||
|
Dimensions (L x W x H) (standard housing) |
(114 x 96.5 x 94) mm3 | ||
|
Weight without objective (standard housing) |
1.9 kg | ||
| Beam displacement | 12.54 mm | ||
| Other Provisions | |||
| Water cooling | no | ||
| Air cooling | no | ||
| Options | objectives with optimized mounting kits | ||
| Other Specifications | |||
|
Dimensions (L x W x H) (standard housing) |
(114 x 96.5 x 94) mm3 | ||
|
Weight without objective (standard housing) |
1.9 kg | ||
| Beam displacement | 12.54 mm | ||
| Operating temperature | 25 °C ± 10 °C | ||
| Gain error | < 5 mrad | ||
| Zero offset deviation | < 5 mrad | ||
| Skew | |||
|
Step response time (settling to 1/1000 of full scale) |
|||
| Typical Optical Configurations | |||
| Applications | |||
| Typical Applications |
Marking applications, Materials processing in the semiconductor industry, Microstructuring, Processing-on-the-fly |
||