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| SCANcube III 14 | |||
| Aperture | 14 mm | ||
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Angle Transmitter of Galvanometer Scanners |
analog position detector | ||
| Optical Configuration | |||
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Wavelength range (standard) |
Standard coatings for all common laser systems: YAG- & fiber lasers, Green lasers, UV lasers, CO2 lasers In addition, our portfolio includes numerous multiple wavelength and broadband coatings |
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Max. laser power (standard systems, 100% duty cycle) |
250 W @ 1064 nm | ||
| Typical scan angle | ±0.35 rad (opt.) | ||
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Image field size (1064 nm, f = 160 mm) |
95 mm x 95 mm | ||
| Fiber adapter | no | ||
| Gain error | < 5 mrad | ||
| Zero offset deviation | < 5 mrad | ||
| Dynamic | |||
| Number of installed tunings | 1 | ||
| Typical tuning | fast vector tuning | ||
| Tracking error | 0.15 ms | ||
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Marking speed (f = 160 mm) |
2.0 m/s | ||
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Positioning speed (f = 160 mm) |
14.0 m/s | ||
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Writing speed (with F-Theta objective, f = 160 mm) |
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| High writing quality | 500 cps | ||
| Good writing quality | 740 cps | ||
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Step response (settling to 1/1000 of full scale) |
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| 1% of full scale | 0.35 ms | ||
| 10% of full scale | 0.90 ms | ||
| Precision | |||
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Repeatability (RMS) |
< 2 µrad | ||
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Positioning resolution (max.)* |
16 bit * | ||
| Nonlinearity | < 0.9 mrad / 44° | ||
| Temperature drift | |||
| Offset | < 25 µrad/K | ||
| Gain | < 25 ppm/K | ||
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8 hour drift (after 30 min warm-up) |
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| Offset | < 100 µrad | ||
| Gain | < 100 ppm | ||
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24 hour drift (after 3 h warm-up) |
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| Offset | |||
| Gain | |||
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* 16 bit: based on the full angle range (e.g. positioning resolution 11 µrad for angle range ±0.36 rad)
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| Electrics / Control | |||
| Servo control galvanometer scanner | analog servo control board | ||
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Control interface (alternatives) |
digital SL2-100, digital XY2-100 standard, analog ±4.8 V |
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| Advanced diagnosis options | no | ||
| Power requirements | ±15 V DC, max. 3 A each | ||
| Mechanics | |||
| Scan axes | 2-axis system | ||
| Housing variants | standard: scan head | ||
| Connector positions | beam entrance side | ||
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Dimensions (L x W x H) (standard housing) |
(133.5 x 99.5 x 105.5) mm3 | ||
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Weight without objective (standard housing) |
2.3 kg | ||
| Beam displacement | 16.42 mm | ||
| Other Provisions | |||
| Water cooling | no | ||
| Air cooling | no | ||
| Options | objectives with optimized mounting kits | ||
| Other Specifications | |||
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Dimensions (L x W x H) (standard housing) |
(133.5 x 99.5 x 105.5) mm3 | ||
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Weight without objective (standard housing) |
2.3 kg | ||
| Beam displacement | 16.42 mm | ||
| Operating temperature | 25 °C ± 10 °C | ||
| Gain error | < 5 mrad | ||
| Zero offset deviation | < 5 mrad | ||
| Skew | |||
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Step response time (settling to 1/1000 of full scale) |
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| Typical Optical Configurations | |||
| Applications | |||
| Typical Applications |
Marking applications, Materials processing in the semiconductor industry, Microstructuring, Processing-on-the-fly |
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