excelliSCAN 14
Aperture 14 mm
Angle Transmitter
of Galvanometer Scanners 		digital encoder
Optical Configuration
Wavelength range
(standard) 		Standard coatings for all common laser systems:
YAG- & fiber lasers,
Green lasers,
UV lasers,
DUV lasers,
CO2 lasers

In addition, our portfolio includes numerous multiple wavelength and broadband coatings, as well as coatings for short-pulse applications and polarization-maintaining coatings
Max. laser power
(standard systems, 100% duty cycle) 		500 W @ 1064 nm
with air cooling
Typical scan angle ±0.35 rad (opt.)
Image field size
(1064 nm, f = 160 mm) 		95 mm x 95 mm
Fiber adapter no
Gain error < 5 mrad
Zero offset deviation < 5 mrad
Dynamic
Number of installed tunings 1
Typical tuning universal tuning
Tracking error 0 ms
Marking speed
(f = 160 mm) 		< 4 m/s
Positioning speed
(f = 160 mm) 		< 30 m/s
Writing speed
(with F-Theta objective, f = 160 mm)
High writing quality 850 cps
Good writing quality 1000 cps
Step response
(settling to 1/1000 of full scale)
1% of full scale
10% of full scale
Precision
Repeatability
(RMS) 		< 0.4 µrad
Positioning resolution
(max.)* 		20 bit *
Nonlinearity < 0.5 mrad / 44°
Temperature drift
Offset < 10 µrad/K
Gain < 4 ppm/K
8 hour drift
(after 30 min warm-up)
Offset < 20 µrad
Gain < 20 ppm
24 hour drift
(after 3 h warm-up)
Offset < 20 µrad
Gain < 25 ppm
* 20 bit: based on the full angle range (e.g. positioning resolution 0.7 µrad for angle range ±0.36 rad), <br /> resolutions better than 16 bit (11 µrad) only together with SL2-100 interface
Electrics / Control
Servo control galvanometer scanner digital servo control board
Control interface
(alternatives) 		digital SL2-100
Advanced diagnosis options yes (iDRIVE)
Power requirements 30 V DC, max. 3 A
Mechanics
Scan axes 2-axis system
Housing variants standard: scan head
Connector positions beam entrance side,
alternatively opposite to beam exit side
Dimensions (L x W x H)
(standard housing) 		(189.1 x 118 x 158.5) mm3
with water cooling
Weight without objective
(standard housing) 		approx. 7 kg
Beam displacement 16.42 mm
Other Provisions
Water cooling yes
Air cooling yes (compressed air cooling of mirrors)
Options objectives with optimized mounting kits
Other Specifications
Dimensions (L x W x H)
(standard housing) 		(189.1 x 118 x 158.5) mm3
with water cooling
Weight without objective
(standard housing) 		approx. 7 kg
Beam displacement 16.42 mm
Operating temperature 25 °C ± 10 °C
Gain error < 5 mrad
Zero offset deviation < 5 mrad
Skew
Step response time
(settling to 1/1000 of full scale)
Typical Optical Configurations
Applications
Typical Applications Photovoltaic production,
Laser micromachining, Display production,
Deep engraving,
Drilling,
Medical technology