intelliSCAN III 10

intelliSCAN III 14

intelliSCAN III 20

intelliSCAN III 30

III Series

intelliSCAN III 10

Aperture

10 mm

Angle Transmitter of Galvanometer Scanners

analog position detector

Show Optical Configuration

Wavelength range
(standard)

Standard coatings for all common laser systems:
YAG- & fiber lasers,
Green lasers,
UV lasers,
DUV lasers,
CO₂ lasers

In addition, our portfolio includes numerous multiple wavelength and broadband coatings, as well as coatings for short-pulse applications and polarization-maintaining coatings

Max. laser power
(standard systems, 100% duty cycle)

200 W @ 1064 nm

Typical scan angle

±0.35 rad (opt.)

Image field size
(1064 nm, f = 160 mm)

120 mm x 120 mm
(for f = 163 mm)

Typical spot size
(1064 nm, f = 160 mm, M² = 1.0)

32 µm

Show Dynamics

Number of installed tunings

up to 3

Typical tuning

fast vector tuning

Tracking error

0.11 ms

Marking speed
(f = 160 mm)

3.5 m/s

Positioning speed
(f = 160 mm)

12 m/s

Writing speed
(with F-Theta lens, f = 160 mm)

High writing quality

760 cps

Good writing quality

1080 cps

Step response time
(settling to 1/1000 of full scale)

1% of full scale

0.40 ms

10% of full scale

1.1 ms

Precision

Repeatability
(RMS)

< 2 µrad

Positioning resolution
(max.)*

18 bit *

Nonlinearity

< 0.9 mrad / 44°

Temperature drift

Offset

< 15 µrad/K

Gain

< 25 ppm/K

8-h-drift
(after 30 min warm-up)

Offset

< 100 µrad

Gain

< 100 ppm

24-h-drift
(after 3 h warm-up)

Offset

< 100 µrad

Gain

< 100 ppm

* 18 bit: based on the full angle range (e.g. positioning resolution 2.8 µrad for angle range ±0.36 rad),
resolutions better than 16 bit (11 µrad) only together with SL2-100 interface

Electronics / Control

Servo control galvanometer scanner

digital servo control board

Control interface
(alternatives)

digital SL2-100,
digital XY2-100 Enhanced

Advanced diagnosis options

yes (iDRIVE)

Power requirements

30 V DC, max. 6 A

Mechanics

Scan axes

2-axis system

Housing variants

standard: scan head
alternative: module (without housing)

Connector positions

beam entrance side,
alternatively opposite to beam exit side

Weight without objective
(standard housing)

3 kg

Dimensions (L x W x H)
(standard housing)

(175 x 114 x 147) mm³

Beam displacement

12.56 mm

Other Provisions

Water cooling

optionally

Air cooling

optionally

Other Specifications

Operating temperature

25 °C ± 10 °C

Gain error

< 5 mrad

Zero offset deviation

< 5 mrad

Add-ons

Combinable with varioSCAN II for 3D applications,
control with SCANLAB´s RTC boards,
camera adapter

Typical Applications

Micromachining,
Marking, welding, drilling,
Rapid prototyping,
Rapid tooling,
Materials processing in the semiconductor industry,
Processing-on-the-fly