See as well the conference programm for LAMOM (Laser Applications in Microelectronic and Optoelectronic Manufacturing) XXI

Session 12: Laser Surface Structuring I,
Thursday 18 February 2016, 9:20 AM - 9:40 AM
"Time-optimized laser micro machining by using a new high dynamic and high precision galvo scanner"
Author(s): Beat Jaeggi, Beat Neuenschwander, Markus Zimmermann, Berner Fachhochschule Technik und Informatik (Switzerland); Markus Zecherle, Ernst Wilhelm Boeckler, SCANLAB AG (Germany)